Proceedings of the 2024 Brawijaya International Conference (BIC 2024)

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Phase Evolution and Photocatalytic Properties of Mnox Thin Films By Thermal Oxidation of Sputtered Mn Films

Authors
Endrika Widyastuti1, *, Jue-Liang Hsu2, Ying Chieh Lee3, 4, *
1Department of Food Science and Biotechnology, Faculty of Agricultural Technology, Universitas Brawijaya, Malang, 65135, Indonesia
2Department of Biological Science and Technology, National Pingtung University of Science and Technology, Pingtung, 91201, Taiwan
3Institute of Precision Electronic Components, National Sun Yat-Sen University, Kaohsiung, 804, Taiwan
4Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 804, Taiwan
*Corresponding author. Email: endrika_w@ub.ac.id
*Corresponding author. Email: yc56@mail.nsysu.edu.tw
Corresponding Authors
Endrika Widyastuti, Ying Chieh Lee
Available Online 11 November 2025.
DOI
10.2991/978-94-6463-854-7_12How to use a DOI?
Keywords
MnOx thin films; Photocatalytic activity; Sputtered Mn film; Thermal oxidation
Abstract

Manganese oxide (MnOx) thin films were successfully prepared on a glass substrate by thermal oxidation of sputtered manganese (Mn) film in the air. The different oxidation temperatures range of 200 to 500 ℃ were used to evaluate the phase evolution, crystalline behavior, optical and photocatalytic properties of MnOx thin films. X-Ray diffraction analysis shows that the metal phase coexisted when Mn thin film oxidized at 200 ℃. However, increasing oxidation temperature from 300 to 500 ℃ promotes the transformation of the metal phase to MnO, Mn3O4, and Mn2O3 phases. With increasing oxidation temperature, the optical transmittance and energy bandgap also increased. Moreover, the coexistence of Mn3O4 and Mn2O3 phases on MnOx sample significantly reduced the transmittance (37%). The energy band gap (Eg) of MnOx thin film was around 2 to 3.6 eV. The degradation efficiency of the MB solution increases with increasing irradiation time. Mn oxidized at 400 ℃ and composed of a full Mn3O4 phase with a band gap of around 3.60 eV exhibited the best photocatalytic activity for the degradation of methylene blue solution. Different oxidation temperatures of MnOx were observed and found to have their activity for MB degraded in the order of oxidation temperature of 400 ℃ > 500 ℃ > 300 ℃ > 200 ℃. This study demonstrates that the magnetron sputtering method through the thermal oxidation treatment for oxide surface growth of Mn to form MnOx provides a simpler, more efficient, and more cost-effective method with suitable structure and properties from metallic films.

Copyright
© 2025 The Author(s)
Open Access
Open Access This chapter is licensed under the terms of the Creative Commons Attribution-NonCommercial 4.0 International License (http://creativecommons.org/licenses/by-nc/4.0/), which permits any noncommercial use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license and indicate if changes were made.

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Volume Title
Proceedings of the 2024 Brawijaya International Conference (BIC 2024)
Series
Atlantis Advances in Applied Sciences
Publication Date
11 November 2025
ISBN
978-94-6463-854-7
ISSN
3091-4442
DOI
10.2991/978-94-6463-854-7_12How to use a DOI?
Copyright
© 2025 The Author(s)
Open Access
Open Access This chapter is licensed under the terms of the Creative Commons Attribution-NonCommercial 4.0 International License (http://creativecommons.org/licenses/by-nc/4.0/), which permits any noncommercial use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license and indicate if changes were made.

Cite this article

risenwbib
TY  - CONF
AU  - Endrika Widyastuti
AU  - Jue-Liang Hsu
AU  - Ying Chieh Lee
PY  - 2025
DA  - 2025/11/11
TI  - Phase Evolution and Photocatalytic Properties of Mnox Thin Films By Thermal Oxidation of Sputtered Mn Films
BT  - Proceedings of the 2024 Brawijaya International Conference (BIC 2024)
PB  - Atlantis Press
SP  - 133
EP  - 153
SN  - 3091-4442
UR  - https://doi.org/10.2991/978-94-6463-854-7_12
DO  - 10.2991/978-94-6463-854-7_12
ID  - Widyastuti2025
ER  -